A new Dimension in Stability and Responsiveness on Leaks down to 10-12 atm/css
The INFICON UL1000 Fab Mobile Helium Leak Detector is specifically designed to meet the requirements of semi-conductor, clean room and hydrocarbon free applications. Making ease of use, leak detection efficiency and mobility within the fab environment system priorities, the UL1000 Fab provides an extremely fast leak rate response across all measurement ranges.
The UL1000 Fab offers never before seen leak rate stability down to < 5x10-12 atm cc/s through an optimised vacuum architecture that combines high helium pumping speed and high inlet pressures. Proprietary software, I-CAL (Intelligent Calculation Algorithm of Leak Rates), allows you to forget long response times in low leak rate ranges as the UL1000 Fab responds quickly to all leak rate ranges.
With the addition of the TC1000 Test Chamber accessory, the UL1000 Fab Helium Leak Detector provides easy, fast and accurate testing of hermetically sealed parts like IC packages, quartz crystals and laser diodes (according to MIL-STD 883, Method 1014).