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UL3000 Fab Mobile Helium Leak DetectorSpecifically designed for the needs of leak checking in semiconductor applications.
It features flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.
| Specifications | UL3000 Fab | ||
|---|---|---|---|
| Min. detectable leak rate for helium (vacuum method) | <5 x 10-12 mbar l/s | ||
| Min. detectable leak rate for helium (sniffer mode) | <5 x 10-8 mbar l/s | ||
| Max. inlet pressure (MASSIVE mode) | 1000 mbar | ||
| Pumping speed during evacuation | >32 m³/h | ||
| Helium pumping speed (high sensitive mode ULTRA) | 4 l/s | ||
| Response time | <1 s | ||
| Time until ready for operation | <3 min | ||
| Detectable masses (ULTRATEST Sensor Technology) | 2, 3, 4 (H2, 3He, He) | ||
| Ion source | 2 filaments, iridium/yttria oxide coated | ||
| Test port | DN 25 KF | ||
| Adjustable triggers | 4 | ||
| Interface | 2 x USB, Ethernet / LAN | ||
| Supply voltage | 100 to 240 V 50/60 Hz (AC) | ||
| Power consumption | typ. 700 VA, max. 1500 VA | ||
| Dimensions (L x W x H) | 1050 x 472 x 987 mm (42 x 21 x 34 in.) | ||
| Weight | 118 kg |
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