Inficon UL3000 FAB Helium Leak Detector

Part Number: 550-200 Description:

UL3000 Fab Mobile Helium Leak DetectorSpecifically designed for the needs of leak checking in semiconductor applications.

It features flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.

  • Faster pump down (evacuation) times due to higher air pumping speed.
  • Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
  • Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
  • The UL3000 Fab offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.
  • Semiconductor Fabs
  • Flat Panel Display manufacturing
  • Solar Cell fabrication
  • Glass and Web (roll to roll) coating
  • General vacuum coating & applications
Specifications UL3000 Fab
Min. detectable leak rate for helium (vacuum method) <5 x 10-12 mbar l/s
Min. detectable leak rate for helium (sniffer mode) <5 x 10-8 mbar l/s
Max. inlet pressure (MASSIVE mode) 1000 mbar
Pumping speed during evacuation >32 m³/h
Helium pumping speed (high sensitive mode ULTRA) 4 l/s
Response time <1 s
Time until ready for operation <3 min
Detectable masses (ULTRATEST Sensor Technology) 2, 3, 4 (H23He, He)
Ion source 2 filaments, iridium/yttria oxide coated
Test port DN 25 KF
Adjustable triggers 4
Interface 2 x USB, Ethernet / LAN
Supply voltage 100 to 240 V 50/60 Hz (AC)
Power consumption typ. 700 VA, max. 1500 VA
Dimensions (L x W x H) 1050 x 472 x 987 mm (42 x 21 x 34 in.)
Weight 118 kg

PDF Downloads

UL3000 Data sheet Download


Part Number: 551-015 Decription: Remote Control RC1000WL, wireless, incl. wireless transmitterPart Number: 525-002 Decription: SL3000-5, sniffer line 5 m length

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