■ Semiconductor industry
■■ Large area coating
■■ Solar industry
■■ Accelerators
■■ Vacuum components – feedthroughs,
valves, bellows, expansion joints
■■ Laser technology
■■ Ultra-pure media supply
■■ Electronics
■■ Aeronautics
■■ Medical technology
Backing pump capacity | 15 m³/h | 8.83 cfm | 250 l/min |
Connection flange (in) | DN 25 ISO-KF |
Detectable gases | 4He, 3He, H2 |
Dimensions (L x W x H) | 547 x 375 x 393 mm | 21.54 x 14.76 x 15.47 inch |
I/O interfaces | Standard 15 pins I/O |
Interface: Connection, device side | Basic 15 pins I/O |
Minimum detectable leakage rate for helium (sniffing leak detection) | 5 · 10-10 Pa m3/s | 3.75 · 10-9 Torr l/s | 5 · 10-9 mbar l/s |
Minimum detectable leakage rate for helium (vacuum leak detection) | 5 · 10-13 Pa m³/s |
Operating temperature (sniffing test) | 0-35 °C | 32-95 °F | 273-308 K |
Operating temperature (vacuum test) | 0-45 °C | 32-113 °F | 273-318 K |
Power consumption max. | 850 W |
Protection degree | IP20 |
Pumping speed for He | 2.5 l/s |
Sound power | 52 dB(A) |
Sound pressure level | 52 dB(A) |
Start-up time (20°C) without calibration | ~ 3 min |
Supply | 200 – 240 V, 50/60 Hz |
Test method | Vacuum and sniffing leak detection |
Weight | 56 kg | 123.46 lb |
For further details and prices on any of our products please contact our sales team.
For help with our products, please contact our service team.
Vacuum Precision supplies, services and stocks a whole range of products specifically for the High Vacuum Industry.